TOSMICRON-S系列是配备有的Ｘ射线部件，可获得鲜明图像的微焦点Ｘ射线检查装置。另外，TOSMICRON-S系列通过从基本机构到软件的通用化，提高了设备的功能性和信赖性。
TOSMICRON-S系列的共同特性
●易于操作、可全部通过鼠标操作
●采用·高速载物台(具有线性计测功能)，通过多种载物台自动移动功能、可以大幅提高检查效率。
●具有同步跟踪功能，即使倾斜，放大倍数和图像亮度均不会改变。
●可以从FD类型(装配平板)和IN类型(装配I.I.)进行选择。
TOSMICRON-S3000, S4000 系列 (通用垂直型)
Tilted high performance type TOSMICRON-S5000 series
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Features · Loaded with newly developed open tube X-ray generator. The life of filament is three times longer than that of our conventional model. · Loaded with high performance software which is common to TOSMICRON-S series and also loaded with high-speed and high-accuracy mechanism. Therefore, it is materialized both comfortable operability and high performance. · By tilting the sensor up to 60 degrees, it can get oblique image. Loaded with SYNCHRO TRACKING as a standard. · Can provide large table type(600X350mm). Applicable field · High magnification for inspecting the IC and electronic components · Joint inspection for surface mounted devices · Inspection for small precision devices |
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Tracking of inspection point by SYNCHRO TRACKING
SYNCHRO TRACKING is an automatic tracking function which can track the inspection point to be a criteria when changing magnification and tilting angle. It can also get constant brightness even when tilting. With this function, smooth inspection is possible without missing the inspection point.
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- Magnification can be constant because the mechanism moves to up and down direction and horizontal direction so the geometric condition does not change when sensor is tilting. |
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- The inspection point is never missed even if the mechanism goes up and down to change the magnification when tilting because the mechanism tracks to horizontal direction. |
Image Example (BGA)
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Main specifications
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X-ray generator |
Open tube type, Maximum voltage: 110kV, |
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Sensor |
4/2 Inches (Image Intensifier) |
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Maximum magnification |
Approx. 450times |
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Tilting function |
Tilting degree: 0 to 60° |
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Table size |
X410mm×Y360mm(Effective inspection area 350×300mm) |
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Outer dimensions |
W1150×H1670×D1430mm(Standard type) |
Vertical type for general typeTOSMICRON-S3000,S4000 series
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Features · Can select Open tube type(S3000)and Closed tube type(S4000). · Loaded with high performance software, high-speed and high-accuracy mechanism, which are common to TOSMICRON-S series. · Can provide large table type (600×350mm). · The sensor can choose I.I. type and FPD type. · Improved reliability by mirror hard disks. Applicable field · IC, electronic parts inspection · Solder inspection of mounted chips · Small precision parts inspection |
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Main specifications
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IC bonding wire |
Mounted chip capacitor |
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Model |
S3110IN |
S4090FD |
S4090IN |
S4130IN |
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X-ray generator |
Open tube |
Closed tube |
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X-ray capability |
110kV, 3μm |
90kV, 5μm |
130kV, 5μm |
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Sensor |
4/2inches I.I. |
FPD |
4/2inches I.I. |
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Table size |
410×360mm(Effective inspection area 350×300mm)(Standard type) |
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Outer dimensions |
W1150×H1650×D1095mm |
W1150×H1790×D1095mm |
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Multi tilted high performance typeTOSMICRON-S8160IN
Loaded with sensor tilting and table rotation. This model can get stereoscopic X-ray image from multi angles. Also loaded with Micro focus X-ray generator whose minimum focal spot is 1µm, can get sharp image in case of high magnification inspection.